Journal of Engineering
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Study results from E. Mihaylova et al provide new insights into optical engineering
February 4th, 2009
"Micro-electromechanical systems (MEMS) behave differently from massive samples. Conventional testing and inspection techniques usually fail at the microscale," scientists in Dublin, Ireland report.
"Recently there has been an increasing interest in the application of optical techniques for microstructure testing, because they are high-resolution, non-contact, full-field, fast and relatively inexpensive. New interferometric systems, which are suitable for microscopic optical metrology, are of interest for engineering and industrial applications. A modified electronic speckle pattern shearing interferometer (ESPSI) with a very simple shearing device has been designed for...
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Source: Journal of Engineering (2009-02-04)